Methods and systems of performing device failure analysis,...

Details Methods and systems of performing device failure analysis,... Methods and systems of performing device failure analysis,...

2007-12-14

2010-11-30

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S3960ML, C250S398000, C250S492200, C250S492210, C438S014000, C382S145000

Reexamination Certificate

active

07842920

ABSTRACT:
An analysis system has a charged particle beam instrument and a scanning probe microscope operably coupled with the charged particle beam instrument. A stage defines an aperture, the stage is adapted to support the sample over the aperture and finely move the sample at least along an X and Y axis, the aperture further situated in an operable area of the charged particle beam. The charged particle beam is used to mill the sample, while the scanning probe microscope is used to measure elements exposed by the milling.

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