Methods and systems for controlling reticle-induced errors

Details Methods and systems for controlling reticle-induced errors Methods and systems for controlling reticle-induced errors

2005-06-28

2005-06-28

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S110000, C702S082000, C702S084000, C356S401000

Reexamination Certificate

active

06912435

ABSTRACT:
Systems and methods for controlling at least one reticle-induced error in a process system, the systems and methods including adjusting measurement data associated with the process system, where the adjustment can be based on at least one reticle identifier (ID) associated with the measurement data, and reticle-induced error data associated with the at least one reticle ID. The methods and systems also include combining the adjusted measurement data to compute at least one control for the process system.

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