4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Inficon LT Inc.

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Methods and systems for controlling critical dimension (CD)...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Methods and systems for controlling reticle-induced errors

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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