Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2008-07-01
2008-07-01
Berman, Jack I. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S492210, C250S3960ML, C250S491100, C250S492100, C250S492300
Reexamination Certificate
active
07394073
ABSTRACT:
An angle measurement system for an ion beam includes a flag defining first and second features, wherein the second feature has a variable spacing from the first feature, a mechanism to translate the flag along a translation path so that the flag intercepts at least a portion of the ion beam, and a sensing device to detect the ion beam for different flag positions along the translation path and produce a sensor signal in response to the detected ion beam. The sensor signal and corresponding positions of the flag are representative of a vertical beam angle of the ion beam in a vertical plane. The sensing device may include a mask and a mechanism to translate the mask in order to define a beam current sensor on a portion of an associated Faraday sensor.
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Clough Arthur H.
Cummings James J.
Donahue Mark
Hermanson Eric
Mollica Rosario
Berman Jack I.
Logie Michael J
Varian Semiconductor Equipment Associates Inc.
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