Methods and apparatus for generating a library of spectra

Details Methods and apparatus for generating a library of spectra Methods and apparatus for generating a library of spectra

2008-03-31

2010-11-23

Nghiem, Michael P (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

Reexamination Certificate

active

07840375

ABSTRACT:
A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.

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U.S. Appl. No. 11/611,640, Ravid et al.
U.S. Appl. No. 12/059,464, Ravid et al.

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