Methods and apparatus for configuring plasma cluster tools

Details Methods and apparatus for configuring plasma cluster tools Methods and apparatus for configuring plasma cluster tools

2007-01-09

2007-01-09

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S097000, C700S101000, C700S121000, C438S005000

Reexamination Certificate

active

11098037

ABSTRACT:
A method for configuring a specific plasma cluster tool having a plurality of modules. The method includes providing a set of module option definition files, the set of module option definition files containing generic configuration definitions for generic plasma cluster tools. The method further includes providing a set of tool-specific protection information, the set of tool-specific protection information including data that specifically identifies the particular plasma cluster tool for which the configuring is intended. The method further includes providing a set of tool-specific options specifications, the set of tool-specific options specifications specifying options that are specified for the specific plasma cluster tool. The method additionally includes generating a key file, the key file encapsulating configuration restrictions imposed on the specific plasma cluster tool, the key file being configured to be a required file in the configuring the specific plasma tool.

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patent: 7082345 (2006-07-01), Shanmugasundram et al.
Lopez, Marcel and Woods, Samuel: “Systems of Multiple Cluster Tools: Configuration and Performance Under Perfect Reliability”. IEEE Transactions on Semiconductor Manufacturing, vol. 11, No. 3 Aug. 1998.

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