Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2006-07-11
2006-07-11
Potter, Roy (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S051000
Reexamination Certificate
active
07074636
ABSTRACT:
A method for reducing occurrences of loose gettering material particles within micro-electromechanical system (MEMS) devices is described. The MEMS devices include a micro-machine within a substantially sealed cavity formed by a housing and a cover for the housing. The cavity containing a getter mounted on a getter substrate which is to be attached to the cover. The method includes providing an area between a portion of the cover and a portion of the getter substrate, positioning the getter within the area, and attaching the getter substrate to the cover.
REFERENCES:
patent: 6534850 (2003-03-01), Liebeskind
Curtis Harlan L.
DCamp Jon B.
Dunaway Lori A.
Glenn Max C.
Armstrong Teasdale LLP
Honeywell International , Inc.
Khaled, Esq. Dina
Potter Roy
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