Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate
2007-03-30
2009-08-25
Carrillo, Sharidan (Department: 1792)
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
C427S488000, C427S489000, C427S490000, C427S491000, C427S523000, C427S524000, C427S525000, C427S526000, C427S527000, C427S528000, C427S529000, C427S530000, C427S531000, C427S533000, C427S534000, C427S535000, C427S536000, C427S537000, C427S538000, C427S539000, C427S562000, C427S563000, C427S564000, C427S569000, C427S570000, C427S571000, C427S572000, C427S573000, C427S574000, C427S575000, C427S576000, C427S577000, C427S578000, C427S579000, C216S052000, C216S053000, C216S067000, C216S083000, C216S084000, C216S
Reexamination Certificate
active
07578889
ABSTRACT:
Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications and manufacturing yields are enhanced. Pre-cleaning of tools used in the cleaning process helps prevent contamination of the electrode being cleaned.
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Avoyan Armen
Daugherty John E.
Jiang Linda
Shih Hong
Wu Shun Jackson
Buchanan & Ingersoll & Rooney PC
Carrillo Sharidan
Lam Research Corporation
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