4. Cleaning and liquid contact with solids
  5. Processes
  6. For metallic, siliceous, or calcareous basework, including...

Linda Jiang

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Method and apparatus for cleaning low K dielectric and metal...

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Method and apparatus for heating polishing pad

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Reexamination Certificate

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Methodology for cleaning of surface metal contamination from...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2095064

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