Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-03-12
2009-08-04
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S492300
Reexamination Certificate
active
07569818
ABSTRACT:
A method and apparatus for reducing or eliminating crosstalk between a plurality of electron beams is described. The plurality of electron beams may produce test areas on a large area substrate that are adjacent wherein secondary electrons from one test area may be detected in an adjacent test area. In one embodiment, the timing of a primary beam emission and detection of secondary electrons from that primary beam is controlled to eliminate or reduce the possibility of detection of secondary electrons from another primary beam.
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Schmid Ralf
Schwedes Thomas
Applied Materials Inc.
Maskell Michael
Patterson & Sheridan LLP
Vanore David A
LandOfFree
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