Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-10-17
2006-10-17
Smith, Zandra V. (Department: 2822)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S275000, C438S592000, C257S369000, C257S407000, C257S412000, C257SE21002
Reexamination Certificate
active
07122414
ABSTRACT:
The present invention relates generally to barrier layers in transistor gate stacks in integrated circuits, and to processes for forming such gate stacks.
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ASM International, Inc.
Knobbe Martens Olson & Bear LLP
Novacek Christy L.
Smith Zandra V.
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