Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2011-07-12
2011-07-12
Duda, Kathleen (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S394000
Reexamination Certificate
active
07977032
ABSTRACT:
A method of selectively altering material properties of a substrate in one region while making a different alteration of material properties in an adjoining region is provided. The method includes selectively masking a first portion of the substrate during a first exposure and selectively masking a second portion of the substrate during a second exposure. Additionally, a mask may be formed having more than one thickness where each thickness will selectively reduce the amount of energy from a blanket exposure of the substrate thereby allowing a substrate to receive different levels of energy dosage in a single blanket exposure.
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Dimitrakopoulos Christos D.
Edelstein Daniel C.
McGahay Vincent J.
Nitta Satyanarayana V.
Petrarca Kevin S.
Duda Kathleen
International Business Machines - Corporation
Raymond Brittany
Roberts Mlotkowski Safran & Cole P.C.
Schnurmann H. Daniel
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