Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate
2002-05-24
2004-06-01
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
C430S320000, C430S330000, C430S942000
Reexamination Certificate
active
06743570
ABSTRACT:
FIELD OF THE INVENTION
The invention relates to polymers, and in particular to a heat-depolymerizable polycarbonate sacrificial layer
BACKGROUND OF THE INVENTION
Fluid-handling structures with submicron dimensions have recently been used for DNA sorting. Nanofluidic devices also have potential for synthesizing and manipulating chemicals in extremely small quantities. Sacrificial layers have been created and covered with another material as a first step in attempting to create nanofludic tubes. The sacrificial layer is then removed by the use of solvents or acids.
SUMMARY OF THE INVENTION
A polymer acts as a positive electron beam resist, is substantially transparent to ultra violet light, and depolymerizes when heated. In one embodiment, the polymer is poly(cyclohexene carbonate). Other polycarbonates may also be used as a positive electron beam resist.
In one embodiment, the polymer acts as a positive electron beam resist at 5 kV, and depolymerizes at temperatures between approximately 200-300° C. The polymer is removable from underneath other layers by heating, facilitating fabrication of overhanging structures such as tubes by depositing layers on top of the polymer.
REFERENCES:
patent: 2003/0127333 (2003-07-01), Lauks et al.
Bhusari, Dhananjay, “Fabrication of Air-Channel Structures for Microfluidic, Microlectromechanical, and Microelectronic Applications”,Journal of Microelectromechanical Systems10(3), (Sep. 2001), 400-408.
Reed, Hollie A., et al., “Fabrication of Microchannels Using Polycarbonates as Sacrificial Materials”,Journal of Micromechanics and Microengineering, 11, (2001), 733-737.
White, Celesta E., et al., “Synthesis and Characterization of Photodefinable Polycarbonates for Use as Sacrificial Materials in the Fabrication of Microfluidic Devices”,Proceedings from the 2002 SPIE Conference, (2002), 12 pages.
Coates Geoff
Craighead Harold G.
Harnett Cindy K.
Cornell Research Foundation Inc.
Schwegman Lundberg Woessner & Kluth P.A.
Young Christopher G.
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