Method of surface texturizing

Details Method of surface texturizing Method of surface texturizing

2005-08-23

2005-08-23

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

C219S121180

Reexamination Certificate

active

06933508

ABSTRACT:
A method and system for providing a texture to a surface of a workpiece is provided. The method comprises providing a workpiece to a texturizing chamber and scanning a beam of electromagnetic energy across the surface of the workpiece to form a plurality of features thereon. The features formed are generally depressions, protuberances, and combinations thereof. Also provided is a method of reducing contamination in a process chamber. The method comprises scanning a beam of electromagnetic energy across a surface of one or more process chamber components to form a plurality of features thereon, positioning the one or more chamber components into a process chamber, and initiating a process sequence within the process chamber.

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