Method of producing ultrafine silicon tips for the AFM/STM profi

Details Method of producing ultrafine silicon tips for the AFM/STM profi Method of producing ultrafine silicon tips for the AFM/STM profi

1990-08-16

1993-09-07

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156646, H01L 2100

Patent

active

052425410

ABSTRACT:
A method is described for producing ultrafine silicon tips for the AFM/STM profilometry comprising:

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