Method of producing an image reversal negative photoresist havin

Details Method of producing an image reversal negative photoresist havin Method of producing an image reversal negative photoresist havin

1990-04-24

1991-05-28

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430328, 430330, G03C 516, G03F 740, G03F 7022, G03F 7039

Patent

active

050194887

ABSTRACT:
A method for producing a negative image by coating a substrate with a photosensitive layer containing a blocked hydrophobic polymer capable of deblocking in the presence of an acid, and an oxime sulfonate ester or o-quinone-4-sulfonyl-containing diazide, then imagewise exposing, treating with a gaseous base, removing excess base, overall flood exposing, baking and developing with an aqueous alkaline solution.

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