Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1991-07-22
1993-04-06
Turner, Samuel A.
Optics: measuring and testing
By polarized light examination
With birefringent element
356356, 356401, G01B 902
Patent
active
052007987
ABSTRACT:
A method for detecting position detection marks on the bottom surface of a sample substrate and for determining the pattern forming positions on the top surface of the sample on the basis of the detected mark positions makes it possible to virtually eliminate the measurement errors caused by sample tilt in the position measurements regarding the sample top surface. When the sample tilts, a positional difference occurs between the top and bottom surfaces of the sample, and errors are accordingly generated in the position measurements from the sample top surface. According to the invention, the mark position measurements from the sample bottom surface are made to contain a deviation that varies with the tilt angle of the sample. The deviation is used to cancel the errors in the measured positions.
REFERENCES:
patent: 4243323 (1981-01-01), Breckinridge
patent: 4746217 (1988-05-01), Holly
patent: 4881815 (1989-11-01), Sommargren
Applied Optics, vol. 20, No. 4, Feb. 15, 1981, "Optical Heterodyne Profilometry", G. Sommargren, pp. 610-618.
"Electronic Materials", Jan. 1991, pp. 55-60.
Itou Masaaki
Katagiri Soichi
Moriyama Shigeo
Terasawa Tsuneo
Hitachi , Ltd.
Turner Samuel A.
LandOfFree
Method of position detection and the method and apparatus of pri does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of position detection and the method and apparatus of pri, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of position detection and the method and apparatus of pri will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-540209