4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Shigeo Moriyama

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Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Apparatus for moving table on stage

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Apparatus for precisely moving a table

Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Patent

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Apparatus for processing semiconductor wafers

Abrading – Machine – Rotary tool
Reexamination Certificate

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Automatic focusing apparatus

Patent

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Profile ID: LFUS-PAI-P-68079

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