Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent
1997-01-21
1998-07-21
Gorr, Rachel
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
430327, 430942, G03F 700
Patent
active
057833630
ABSTRACT:
An improvement in a method of charged-particle lithography includes the step of spinning an electrically-conductive layer on a substrate. In one embodiment, an electrically-conductive transfer layer is applied on a substrate. In another embodiment, an electrically-conductive planarizing layer is applied on a substrate. In another embodiment, an electrically-conductive imageable layer is applied on a substrate. In another embodiment, a separate electrically-conductive layer is applied. In another embodiment, a planarizing layer, a transfer layer, or an imageable layer is bombarded with ions to form a thin electrically-conductive carbonized layer.
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Gorr Rachel
National Semiconductor Corporation
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