Method of observing a specimen using a scanning electron...

Details Method of observing a specimen using a scanning electron... Method of observing a specimen using a scanning electron...

2006-07-11

2006-07-11

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S201400, C250S201200, C250S306000, C250S310000, C250S311000

Reexamination Certificate

active

07075077

ABSTRACT:
A method of observing a specimen using a scanning electron microscope, makes it possible to shorten the time required to perform automatic focusing at the time of semiconductor defect automatic review and improves the throughput in the processing in which the specimen is observed. In the above method, the specimen is imaged at a low resolution by the scanning electron microscope to obtain an image, an area for imaging the specimen at a high resolution is specified from the image acquired at the low resolution, the specimen is imaged at a high resolution by the scanning electron microscope to determine a focus position, a focal point of the scanning electron microscope is set to the determined focus position, and a high resolution image in the specified area is acquired in a state in which the focus position has been set to the determined focus position.

REFERENCES:
patent: 5512747 (1996-04-01), Maeda
patent: 6114681 (2000-09-01), Komatsu
patent: 6838667 (2005-01-01), Tsuneta et al.
patent: 2002-124555 (2002-04-01), None
patent: 2003-098114 (2003-04-01), None

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