4. Image analysis
  5. Applications
  6. Manufacturing or product inspection

Hirohito Okuda

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Apparatus and method for classifying defects using multiple...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Apparatus and method for electron beam inspection with...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Defect inspection apparatus and defect inspection method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Defect inspection apparatus and defect inspection method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Defect inspection method

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2331458

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