Method of measuring three-dimensional surface roughness of a...

Details Method of measuring three-dimensional surface roughness of a... Method of measuring three-dimensional surface roughness of a...

2008-03-25

2008-03-25

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S307000, C250S310000

Reexamination Certificate

active

11252115

ABSTRACT:
An improved method of measuring the three-dimensional surface roughness of a structure. A focused ion beam is used to mill a succession of cross-sections or “slices” of the feature of interest at pre-selected intervals over a pre-selected measurement distance. As each cross-section is exposed, a scanning electron microscope is used to measure the relevant dimensions of the feature. Data from these successive “slices” is then used to determine the three-dimensional surface roughness for the feature.

REFERENCES:
patent: 5435850 (1995-07-01), Raqsmussen
patent: 5851413 (1998-12-01), Casella et al.
patent: 6889113 (2005-05-01), Tasker et al.
patent: 2001/0010356 (2001-08-01), Talbot et al.
patent: 2006/0226359 (2006-10-01), Principe

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