Method of measuring resistivity of sidewall of contact hole

Details Method of measuring resistivity of sidewall of contact hole Method of measuring resistivity of sidewall of contact hole

2011-04-12

2011-04-12

Quach, Tuan N. (Department: 2893)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

C438S018000, C438S622000, C438S639000, C257SE21531

Reexamination Certificate

active

07923268

ABSTRACT:
A method of measuring a resistivity of a sidewall of a contact hole formed in a semiconductor device, wherein said semiconductor device includes a first electrode formed on a substrate; a second electrode formed on the first electrode with an insulating film in between; a resist pattern formed on the first electrode and the second electrode; a contact hole formed in the first electrode and the second electrode; and an organic film deposited on the sidewall of the contact hole, includes the steps of: placing a probe needle on the first electrode and the second electrode so that the probe needle contacts with the first electrode and the second electrode several times; establishing electrical conductivity of the probe needle relative to the first electrode and the second electrode; and measuring the resistivity of the organic film between the first electrode and the second electrode.

REFERENCES:
patent: 5925577 (1999-07-01), Solis
patent: 6391669 (2002-05-01), Fasano et al.
patent: 6531327 (2003-03-01), Kanamaru et al.
patent: 7135412 (2006-11-01), Na
patent: 2008/0026573 (2008-01-01), Yanase et al.
patent: 2000-200771 (2000-07-01), None
patent: 2001-053057 (2001-02-01), None

Affiliated with

Also associated with

Rating

Method of measuring resistivity of sidewall of contact hole does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of measuring resistivity of sidewall of contact hole, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of measuring resistivity of sidewall of contact hole will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2696250