Method of measurement accuracy improvement by control of...

Details Method of measurement accuracy improvement by control of... Method of measurement accuracy improvement by control of...

2006-05-16

2006-05-16

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S310000, C250S306000, C250S491100, C250S492200

Reexamination Certificate

active

07045782

ABSTRACT:
A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the second scan over the same location on the specimen is shortened by changing the scanning order of scan lines to enable the scanning to be performed successively while the shrink is small.

REFERENCES:
patent: 5276325 (1994-01-01), Todokoro et al.
patent: 2005/0006598 (2005-01-01), Pearl
patent: 2005/0012050 (2005-01-01), Shemesh
patent: 2001-147112 (2001-05-01), None
L. Reimer, “Scanning Electron Microscopy”, Springer-Verlag Berlin and Heidelberg GbmH & Co., KG, 1985, p. 12-57.

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