Method of manufacturing monolithic inkjet printhead

Details Method of manufacturing monolithic inkjet printhead Method of manufacturing monolithic inkjet printhead

2006-07-04

2006-07-04

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C216S027000

Reexamination Certificate

active

07070912

ABSTRACT:
A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.

REFERENCES:
patent: 6235212 (2001-05-01), Silverbrook
patent: 6475402 (2002-11-01), Nordstrom et al.
patent: 6482574 (2002-11-01), Ramaswami et al.
patent: 11-192714 (1999-07-01), None
patent: 2002-254662 (2002-09-01), None
patent: 2002-0043826 (2002-06-01), None
patent: 2003-0012061 (2003-02-01), None
patent: 2003-0037772 (2003-05-01), None
patent: 2003-0079199 (2003-10-01), None

Affiliated with

Also associated with

Rating

Method of manufacturing monolithic inkjet printhead does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing monolithic inkjet printhead, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing monolithic inkjet printhead will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3608025