Method of manufacturing metal electrode

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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C430S314000, C430S319000, C430S330000, C430S394000

Reexamination Certificate

active

06869751

ABSTRACT:
A manufacturing method for a metal electrode used for a bus electrode, a data electrode, and the like which make up a display panel including a PDP (Plasma Display Panel) by which, when these electrodes are patterned according to a photolithographic method, the edge curl phenomenon can be substantially controlled to the extent that the phenomenon is negligible. The manufacturing method of the invention therefore includes a dry step for drying the layers making up the metal electrode so that flows (F1, F2, and F3) of the solvent occur from a region having a high absorbency of the solvent to a region having a lower absorbency of the solvent.

REFERENCES:
patent: 5312703 (1994-05-01), Wagenblast et al.
New Plasma Display Manufacturing Technology, Saishin Plasma Display Seizo Gijutsu (Japan) Press Journal, Dec. 1, 1997, pp. 96-100 (with partial English translation).

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