Method of manufacturing inorganic nanotube

Details Method of manufacturing inorganic nanotube Method of manufacturing inorganic nanotube

2006-02-28

2006-02-28

Le, Thao Phuong (Department: 2818)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S758000

Reexamination Certificate

active

07005391

ABSTRACT:
A method of manufacturing an inorganic nanotube using a carbon nanotube (CNT) as a template, includes preparing a template on which a CNT or a CNT array is formed, forming an inorganic thin film on the CNT by depositing an inorganic material on the template using atomic layer deposition (ALD), and removing the CNT to obtain an inorganic nanotube or an inorganic nanotube array, respectively.

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