Method of manufacturing an ultra-miniature magnetic device

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S603240, C029S603250, C029S606000, C029S852000, C438S671000

Reexamination Certificate

active

07107666

ABSTRACT:
An ultra-miniature magnetic device generally comprises a conductive winding and a magnetic core. The conductive winding includes an upper conductor and a lower conductor. The magnetic core is of an elongate rectangular or oval shape having two elongate sections and two short sections. The lower conductor is preferably positioned below the elongate sections of the magnetic core while the upper conductor is preferably positioned above the elongate sections of the magnetic core. The lower and upper conductors are electrically connected by conducting via structures that are formed in sequential steps using semiconductor processing technology. The result is a coil winding around the elongate sections, with the short sections being preferably free of windings. The process provides an advantage of avoiding shorting between the via structures and the magnetic core caused by overetching when etching the via holes.

REFERENCES:
patent: 3614554 (1971-10-01), Shield et al.
patent: 3833872 (1974-09-01), Marcus et al.
patent: 3874075 (1975-04-01), Lohse
patent: 4649639 (1987-03-01), Mas
patent: 4847986 (1989-07-01), Meinel
patent: 4927804 (1990-05-01), Zieren et al.
patent: 5070317 (1991-12-01), Bhagat
patent: 5097243 (1992-03-01), Zieren et al.
patent: 5398400 (1995-03-01), Breen
patent: 5420558 (1995-05-01), Ito et al.
patent: 5539369 (1996-07-01), Selker et al.
patent: 5572179 (1996-11-01), Ito et al.
patent: 5583474 (1996-12-01), Mizoguchi et al.
patent: 5585986 (1996-12-01), Parkin
patent: 5801521 (1998-09-01), Mizoguchi et al.
patent: 6008102 (1999-12-01), Alford et al.
patent: 6148500 (2000-11-01), Krone et al.
patent: 6197439 (2001-03-01), Parkin et al.
patent: 6240622 (2001-06-01), Ahn et al.
patent: 3346659 (1983-12-01), None
patent: 0006959 (1979-06-01), None
patent: 0716434 (1996-06-01), None
patent: 0762443 (1997-03-01), None
patent: 0778593 (1997-06-01), None
patent: 64-42110 (1980-02-01), None
patent: 59-172710 (1984-09-01), None
patent: 401053517 (1989-03-01), None
patent: 4-42905 (1992-02-01), None
patent: 405144650 (1993-06-01), None
patent: 406084646 (1994-03-01), None
patent: 63-9107 (1998-01-01), None
Littwin, B., “Buuble Circuit Fabrication by Electrodeposition”, IEEE Transactions on Magnetics, vol. 1 Mag-11, No. 5, Sep. 1975, pp. 1139-1141.
Park et al., “High Current Integrated Microinductors and Microtransformers using Low Temperature Fabrication Processes,”SPIE Proceedingsvol. 2920, 1996 International Symposium on Microelectronics, Minneapolis, Minnesota, USA, Oct. 1996.
Park et al., “A Comparison of Micromachined Inductors with Different Magnetic Core Materials,”IEEE 46thElectronic Components&Technology Conference, Orlando, FL, pp. 375-381, 1996.
Ahn et al., “A Planar Micromachined Spiral Inductor for Integrated Magnetic Microactuator Applications,”J. Micromech. Microeng. , vol. 3, pp. 37-44, 1993.
Ahn et al., “A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils,”Journal of Microelectromechanical Systems, vol. 2, No. 4, pp. 165-173, Dec. 1993.
Ahn et al., “A New Toroidal-Meander Type Integrated Inductor with a Multilevel Meander Magnetic Core,”IEEE Transactions on Magnetics, vol. 30, No. 1, pp. 73-79, Jan. 1994.
Ahn et al., “A Fully Integrated Planar Toroidal Inductor with a Micromachined Nickel—Iron Magnetic Bar,”IEEE Transactions on Components, Packaging, and Manufacturing Technology, Part A., vol. 17, No. 3, pp. 463-469, Sep. 1994.
Ahn et al., “A Fully Integrated Surface Micromachined Magnetic Microactuator with a Multilevel Meander Magnetic Core,”Journal of Microelectromechanical Systems, vol. 2, No. 1, pp. 15-22, Mar. 1993.
Mino et al., “Planar Microtransformer with Monolithically-Integrated Rectifier Diodes for Micro-Switching Converters,”IEEE Transactions on Magentics, vol. 32, No. 2, pp. 291-296.
Hayano et al., “Development of Film Transformer,”IEEE Transactions on Magnetics, vol. 30, No. 6, pp. 4758-4760, Nov. 1994.
Yamaguchi et al., “Characteristics of a Thin Film Microtransformer with Circular Spiral Coils,”IEEE Transactions on Magnetics, vol. 29, No. 5, pp. 2232-2236, Sep.
Yamaguchi et al., “Characteristics of a DC-DC Converter Using a Thin Film Microtransformer and a Microinductor,”IEEE Translations Journal on Magnetics in Japan, vol. 9, No. 6, pp. 84-89, Nov./Dec. 1994.
Yachi et al., “Thin Film Transformer Fabricated by a Dry Process,”NTT Review, vol. 4, No. 3, pp. 46-50, May 1992.
Frazier et al., “Development of Micromachined Devices Using Polymide-Based Processes,”Sensors and Actuators A 45, pp. 47-55, 1994.

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