Method of manufacturing an electrostatic actuator

Details Method of manufacturing an electrostatic actuator Method of manufacturing an electrostatic actuator

2006-12-05

2009-02-24

Deo, Duy-Vu (Department: 1792)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S027000, C216S037000, C216S067000, C347S040000, C347S054000, C347S068000, C347S070000, C347S071000, C347S094000, C361S700000

Reexamination Certificate

active

07494594

ABSTRACT:
An electrostatic actuator for increasing a swing (deflection angle) of a movable structure includes a laminate substrate in which a thin film silicon layer is formed on a silicon substrate through a buried insulating film and a torsion beam movable structure constructed with the thin film silicon layer. A potential difference is generated between a movable side comb-tooth electrode of the movable structure and a fixed side comb-tooth electrode disposed to face the movable side comb-tooth electrode to swing the movable structure. The fixed side comb-tooth electrode is formed in the inside of a through hole bored through the laminate substrate.

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