Method of making small pores defined by a disposable internal sp

Details Method of making small pores defined by a disposable internal sp Method of making small pores defined by a disposable internal sp

1996-07-22

1998-09-29

Chaudhari, Chandra

Semiconductor device manufacturing: process

Including control responsive to sensed condition

438 95, H01L 2100

Patent

active

058145273

ABSTRACT:
A method for fabricating an ultra-small pore or contact for use in chalcogenide memory cells specifically and in semiconductor devices generally in which disposable spacers are utilized to fabricate ultra-small pores or contacts. The pores thus defined have minimum lateral dimensions ranging from approximately 500 to 4000 Angstroms. The pores thus defined may then be used to fabricate a chalcogenide memory cell or other semiconductor devices.

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