4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Guy T. Blalock

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Apparatus and method for removing material from microfeature...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Apparatus for controlling the temperature of a gas...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Apparatus for controlling the temperature of a gas...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Apparatus for improved low pressure inductively coupled high...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Apparatus for improved low pressure inductively coupled high...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-207287

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