Method of making fuse with non-corrosive termination of corrosiv

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

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148DIG55, 438643, H01L 2170, H01L 2700

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active

056187505

ABSTRACT:
A fuse for a semiconductor integrated circuit is provided wherein a strip of corrosive material (82), such as aluminum, has one end thereof connected to a conductive strip (84) of a non-corrosive material and the other end thereof connected to a strip (94) of non-corrosive conductive material. The one end of the conductive strip (82) connected to the conductive strip (84) is connected through a contact (88). Similarly, the other end of the strip (82) is connected through a contact (96) to the non-corrosive conductive strip (94). The strips 84 and 94 provide a barrier to corrosion. This occurs whenever a break (104) is formed in the fuse to expose the ends of the fuse (82) at the break to a corrosive atmosphere. Alternatively, the fuse could be connected to corrosive underlying layers with contacts (118) and (124) of non-corrosive material such as a polysilicon or a polyside, or the active region of the substrate itself.

REFERENCES:
patent: 5015604 (1991-05-01), Lim et al.

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