Etching a substrate: processes – Adhesive or autogenous bonding of two or more...
Patent
1996-10-04
1998-05-19
Powell, William
Etching a substrate: processes
Adhesive or autogenous bonding of two or more...
216 71, 216 39, 156345, B44C 122
Patent
active
057531323
ABSTRACT:
A process for fabricating an electrostatic chuck (20) comprising the steps of (c) forming a base (80) having an upper surface with cooling grooves (85) therein, the grooves sized and distributed for holding a coolant therein for cooling the base; and (d) pressure conforming an electrical insulator layer (45) to the grooves on the base by the steps of (i) placing the base into a pressure forming apparatus (25) and applying an electrical insulator layer over the grooves in the base; and (ii) applying a sufficiently high pressure onto the insulator layer to pressure conform the insulator layer to the grooves to form a substantially continuous layer of electrical insulator conformal to the grooves on the base.
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Birang Manoocher
Cameron John F.
Levinstein Hyman J.
Shamouilian Shamouil
Sherstinsky Semyon
Applied Materials Inc.
Janah Ashok K.
Powell William
Sgarbossa Peter J.
Wilson James C.
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