Method of making an efficient NPN turn-on in a high voltage DENM

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438236, H01L 218238

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active

060717688

ABSTRACT:
A high voltage DENMOS transistor (10) having improved ESD protection. The transistor (10) is optimized to provide maximum substrate current in order to turn on the inherent lateral npn transistor during an ESD event so that the lateral npn can dissipate the ESD event without damage to the transistor (10). This is accomplished by optimizing the overlap (A) of the drain extended region (16) and the gate electrode (28) to control the gate coupling to achieve maximum substrate current.

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1995 International Electron Devices Meeting, Washington, DC, Dec. 1995 "Efficient NPN Operation in High Voltage NMOSFET for ESD Robustness" (C. Duvvury, D. Briggs, J. Rodriguez, F. Carvajal, A Young, D. Redwine and M. Smayling).

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