Method of making a MOS device with an input protection circuit L

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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257358, 257360, 438454, H01L 21265

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active

056416970

ABSTRACT:
A p-type high concentration doped region is formed in a p-type semiconductor substrate between a n-type doped region as part of an input protection circuit and another n-type doped region as part of internal circuitry. A plate is divided into two over the high concentration doped region. The high concentration doped region suppresses generation of a parasitic MOS transistor with the plate for a gate, one of the n-type doped regions for a source, and the other for a drain.

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