Method of making a DRAM with a transfer transistor

Details Method of making a DRAM with a transfer transistor Method of making a DRAM with a transfer transistor

1998-03-26

1999-12-21

Chaudhari, Chandra

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438253, 438549, H01L 218242

Patent

active

060048425

ABSTRACT:
A semiconductor device comprises a semiconductor substrate; a transfer transistor including a gate electrode formed on the semiconductor substrate through a gate insulation film, and a first diffused layer formed in the semiconductor substrate on both sides of the gate electrode; an insulation film which covers an upper surface of the transfer transistor and in which a contact hole reaching the first diffused layer is opened; a capacitor formed on the insulation film and connected to the first diffused layer through the contact hole; a second diffused layer formed in the semiconductor substrate below the contact hole and being the same conduction type as the first diffused layer; and a third diffused layer formed in the semiconductor substrate below the contact hole, formed extending to a region which is deeper than the first and the second diffused layers, and having the same conduction type as the first diffused layer. The semiconductor device of this structure can solve both problems of unstable impurity diffusion from the storage electrode into the semiconductor substrate, which results from an interface state, and mitigation of the electric field mitigation in the storage node, whereby the DRAM can have improved data retention characteristics.

REFERENCES:
patent: 5612241 (1997-03-01), Arima
patent: 5631182 (1997-05-01), Suwanai et al.
patent: 5731234 (1998-03-01), Chen

Affiliated with

Also associated with

Rating

Method of making a DRAM with a transfer transistor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making a DRAM with a transfer transistor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making a DRAM with a transfer transistor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-504406