Method of inspecting reticles and apparatus therefor

Details Method of inspecting reticles and apparatus therefor Method of inspecting reticles and apparatus therefor

1989-10-19

1992-03-24

McGraw, Vincent P.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

356237, 356239, G01N 2188

Patent

active

050981919

ABSTRACT:
Method of inspecting reticles and an apparatus therefor, where means for holding and transferring an inspected reticle and a standard reticle respectively, means for illuminating light with spatial coherency adjusted onto both reticles respectively, and an objective lens for collecting transmitted light or reflected light from the illuminated body produced by the illuminating, are installed on respective Fourier transformation surfaces of both reticle surfaces, and a light blocking plate for blocking light corresponding to the adjusted spatial coherency is installed, and electric signals obtained are compared thereby a defect or a foreign substance existing on the inspected reticle can be detected.

REFERENCES:
patent: 4209257 (1980-06-01), Uchiyama et al.
patent: 4330205 (1982-05-01), Murakami et al.
patent: 4595289 (1986-06-01), Feldman et al.
patent: 4952058 (1990-08-01), Noguchi et al.
patent: 5957367 (1990-09-01), Dulman

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