Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-08-29
2006-08-29
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
07098455
ABSTRACT:
A circuit pattern inspecting instrument includes an electron-optical system for irradiating an electron beam on a sample, an electron beam deflector, a detector for detecting secondary charged particles from the sample, and a mode setting unit for switching between a first mode and a second mode. An electron beam current is larger in the first mode than in the second mode, and an electron beam scanning speed is higher in the first mode than in the second mode. The circuit pattern inspecting instrument is configured so that first the sample is observed in the first mode, then a particular position on the sample is selected based on image data produced by an output of the detector in the first mode, and then the particular position on the sample is observed in the second mode.
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Kaneko Yutaka
Kasai Yuji
Makino Hiroshi
Murakoshi Hisaya
Ninomiya Takanori
Berman Jack I.
Hitachi , Ltd.
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