Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-02-13
2007-02-13
Nhu, David (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S535000, C257SE21133, C257SE21347
Reexamination Certificate
active
10845589
ABSTRACT:
A method of selectively heating a predetermined region of a semiconductor substrate includes providing a semiconductor substrate, selectively focusing a free carrier generation light on only a predetermined region of the semiconductor substrate, irradiating the free carrier generation light on the predetermined region of the semiconductor substrate to increase a free carrier concentration within the predetermined region of the semiconductor substrate, wherein the free carrier generation light causes the predetermined region to increase in temperature by less than a temperature necessary to change the solid phase of the predetermined region, and irradiating the semiconductor substrate with a heating light to selectively heat the predetermined region of the semiconductor substrate.
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Buh Gyoung Ho
Hyun Sang-jin
Shin Yu Gyun
Yahng Ji-Sang
Yon Guk-Hyon
Lee & Morse P.C.
Nhu David
Samsung Electronics Co,. Ltd.
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