Cleaning and liquid contact with solids – Processes – Metal base work – acid treating
Reexamination Certificate
2006-10-17
2010-12-14
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
Metal base work, acid treating
C134S002000, C134S003000, C134S026000, C134S028000, C134S029000
Reexamination Certificate
active
07850786
ABSTRACT:
Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.
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Crockett Mark
DeChellis Micahel
Khullar Aneesh
Lane John W.
Melcer Chris
Applied Materials Inc.
Campbell Natasha
Church Shirley L.
Kornakov Michael
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