Method of handling magnetic semiconductor wafers

Details Method of handling magnetic semiconductor wafers Method of handling magnetic semiconductor wafers

1989-12-14

1992-09-15

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

29 2501, H01L 2100, H01L 2168

Patent

active

051478285

ABSTRACT:
A semiconductor wafer is provided with magnetic material about the periphery for magnetically clamping the wafer on a seating gasket at the processing station. The seating gasket is annular for peripherally supporting the wafer. An electro-magnet establishes a peripheral station magnetic field which attracts the wafer magnetic material to form the clamp. The station magnetic field may by reversed to levitate the wafer onto and off of the seating gasket.

REFERENCES:
patent: 3571911 (1971-05-01), Littwin
patent: 3887996 (1975-06-01), Hartleroad et al.
patent: 3887997 (1975-06-01), Hartleroad et al.
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4724222 (1988-02-01), Feldman
patent: 4771358 (1988-09-01), Miller
patent: 4848536 (1989-07-01), Machida

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