Method of growing silicon and method of manufacturing solar...

Details Method of growing silicon and method of manufacturing solar... Method of growing silicon and method of manufacturing solar...

2011-08-23

2011-08-23

Lee, Cheung (Department: 2812)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C438S492000, C438S507000, C257SE21606, C257SE21703

Reexamination Certificate

active

08003546

ABSTRACT:
In a method of growing silicon (Si) using a reactor, a supercritical fluid including a silicon Si source and hydrogen flows in the reactor, and the Si source reacts with hydrogen. A base substrate of a solar cell may be formed with Si made using the method of growing silicon (Si). The supercritical fluid may be a fluid in which Si is not oxidized and may be, for example, a CO2supercritical fluid with a pressure of about 60 to about 200 atm. The Si source may be TriChloroSilane (TCS) (SiCl3H) or SiH4.

REFERENCES:
patent: 6007869 (1999-12-01), Schreieder et al.
patent: 6932954 (2005-08-01), Wakamatsu et al.
patent: 2002/0104474 (2002-08-01), Wakamatsu et al.
patent: 2003/0202792 (2003-10-01), Goshi
patent: 2005/0181613 (2005-08-01), Xu et al.
patent: 2005/0181633 (2005-08-01), Hochberg et al.
patent: 2006/0174935 (2006-08-01), Sawada et al.
patent: 2010/0055007 (2010-03-01), Ishii
patent: 60-077117 (1985-05-01), None
patent: 61-247614 (1986-11-01), None
patent: 04-193706 (1992-07-01), None
patent: 2006-321675 (2006-11-01), None
patent: 10-2003-0038670 (2003-05-01), None
patent: 10-2007-0084435 (2007-08-01), None

Affiliated with

Also associated with

Rating

Method of growing silicon and method of manufacturing solar... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of growing silicon and method of manufacturing solar..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of growing silicon and method of manufacturing solar... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2793905