Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate
2006-10-26
2010-12-14
Fulk, Steven J (Department: 2891)
Semiconductor device manufacturing: process
Making passive device
Trench capacitor
C438S243000, C257S301000, C257SE29346
Reexamination Certificate
active
07851324
ABSTRACT:
A method of manufacturing a semiconductor device includes forming a metal-insulator-metal (MIM) device having a metal organic chemical vapor deposited (MOCVD) lower electrode and an atomic layer deposited (ALD) upper electrode.
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Chao Lan-Lin
Lin Hsing-Lien
Tsai Chia-Shiung
Tu Yeur-Luen
Wang Chung Chien
Fulk Steven J
Taiwan Semiconductor Manufacturing Company , Ltd.
Thomas Kayden Horstemeyer & Risley
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