Coating processes – Centrifugal force utilized
Patent
1994-03-25
1997-08-19
Bell, Janyce
Coating processes
Centrifugal force utilized
427299, 4273855, 438782, B05D 312
Patent
active
056586159
ABSTRACT:
An apparatus for forming a coating film, comprises a spin chuck for supporting a substrate with one surface facing upward and rotating the substrate about a vertical axis, a first nozzle for supplying a solvent of a coating solution on the substrate, and a second nozzle for supplying the coating solution on a central portion of the substrate. The first and second nozzles are supported by a head such that the supported nozzle moves between a dropping position above the substrate and a waiting position offset from the substrate. The solvent and coating solution are diffused along the surface of the substrate by rotating the spin chuck.
REFERENCES:
patent: 4267212 (1981-05-01), Sakawaki
patent: 4451507 (1984-05-01), Beltz et al.
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5066616 (1991-11-01), Gordon
patent: 5366757 (1994-11-01), Lin
patent: 5366759 (1994-11-01), Beckerle
Database WPI, Section Ch, Week 8625, Derwent Publications Ltd., London, GB; Class G06, AN 86-158886 & JP-A-61 091 655 (Matsushita Eltrn. Corp.), 9 May 1986 *Abstracts)*.
Patent Abstracts of Japan, vol. 10 No. 347, (E-457), 21 Nov. 1986 & JP-A-61 150332 (Toshiba Corp.) 9 Jul 1986, *Abstract*.
Deguchi Masatoshi
Fujimoto Akihiro
Hasebe Keizo
Iino Hiroyuki
Inada Hiroichi
Bell Janyce
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
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