4. Coating apparatus
  5. With means to centrifuge work

Hiroichi Inada

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Apparatus and method for developing resist coated on a substrate

Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Patent

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Coating unit and coating method

Coating processes – Centrifugal force utilized
Reexamination Certificate

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Coating unit and coating method

Coating apparatus – Projection or spray type
Reexamination Certificate

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Developing apparatus

Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate

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Developing process and developing unit

Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate

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Profile ID: LFUS-PAI-P-446131

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