Method of forming an RIE etch barrier by in situ conversion of a

Details Method of forming an RIE etch barrier by in situ conversion of a Method of forming an RIE etch barrier by in situ conversion of a

1983-06-30

1984-02-07

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156646, 156652, 156657, 1566591, 156668, 204192E, 427 93, H01L 21306, C23F 102, B44C 122, C03C 1500

Patent

active

044301537

ABSTRACT:
A method of forming an etch barrier in the reactive ion etching of an aromatic polyamic acid/imide which comprises:

REFERENCES:
patent: 4140572 (1979-02-01), Stein
patent: 4333793 (1982-06-01), Lifshitz et al.
patent: 4377734 (1983-03-01), Mashiko et al.

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