Method of forming a spiral inductor in a semiconductor...

Details Method of forming a spiral inductor in a semiconductor... Method of forming a spiral inductor in a semiconductor...

2008-06-03

2008-06-03

Rose, Kiesha L (Department: 2822)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S531000, C438S516000

Reexamination Certificate

active

07381607

ABSTRACT:
An inductor formed on a semiconductor substrate, comprising active device regions. The inductor comprises conductive lines formed on a dielectric layer overlying the semiconductor substrate. The conductive lines are patterned and etched into the desired shape, in one embodiment a planar spiral. A region of the substrate below the inductor are removed to lower the inductive Q factor.

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