Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2006-04-25
2006-04-25
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S310000, C250S311000
Reexamination Certificate
active
07034296
ABSTRACT:
An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.
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Iizumi Takashi
Nimura Kazutaka
Otaka Tadashi
Sato Mitsugu
Takane Atsushi
Dickstein , Shapiro, Morin & Oshinsky, LLP
Fernandez Kalimah
Hitachi High-Technologies Corporation
Lee John R.
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