Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1996-10-23
1999-03-23
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430323, 430330, G03F 738
Patent
active
058857540
ABSTRACT:
A method of forming a pattern includes the steps of forming a first layer by applying an organic material on a layer to be processed, forming a second layer which can be treated with an organic metal reagent and has a thickness in the range from 30 to 100 nm by applying a material which can be treated with an organic metal reagent on the first layer, selectively forming in the second layer a portion which cannot be treated with an organic metal reagent, treating with an organic metal reagent the portion of the second layer which can be treated with an organic metal reagent, and removing the portion which cannot be treated with an organic metal reagent and a portion of the first layer which is located thereunder.
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Duda Kathleen
Mitsubishi Denki & Kabushiki Kaisha
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