Method of forming a high transparent carbon film

Details Method of forming a high transparent carbon film Method of forming a high transparent carbon film

2008-05-05

2009-12-15

Ahmed, Shamim (Department: 1792)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S488000, C438S780000

Reexamination Certificate

active

07632549

ABSTRACT:
A method of forming a transparent hydrocarbon-based polymer film on a substrate by plasma CVD includes: introducing a main gas consisting of a hydrocarbon gas (CαHβ, wherein α and β are natural numbers) and an inert gas at a flow ratio (R) of CαHβ/inert gas of 0.25 or less into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-based polymer film on the substrate by plasma polymerization of the gas at a processing temperature (T) wherein T≦(−800R+500).

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